The atomic structure of amorphous silicon nitride fibers produced by two differentmethods is revealed using the technique of neutron scattering. Polymer-derived fibersare found to contain excess crystalline silicon and disordered carbon, and fibers annealedin N2 for 100 h contain a cristobalite phase that becomes amorphous under200-kV electron irradiation. Fibers grown from the gas phase, however, are shown toconsist of almost pure amorphous Si, N4, with a small crystalline a -Si, N4 component.Introduction
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