Hi Jie,Here is raw data validation for overlay V144-F of FOHM.As like to Jadan send for change limit and other issues same FHN site.1. 1. In Audit Mode, the OK Unit test results are showed Fail; the normal mode show normal.2. 2. After completion of test, Chamber lid can't open automatically.
đang được dịch, vui lòng đợi..